APPLIED® SIGMAMELTEC- CHIPS FAILING THE TEST

Lucy Williams

• May 08, 2023 03:47

Hi team! One of our customers is having issues with the  Applied^® Sigmameltec^® SFB Mask Bake Series. Their chips are failing. I'm thinking that this could be a particle contamination issue. Have you seen this before? How did you fix it? 

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  Thomas Sullivan

  • May 08, 2023 03:51

  Hi! I'm working on a similar issue! I used a vacuum wand to remove the particles. You can also try with an ionized air blower to remove particles from the mask and wafer surfaces.

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  Ben Mendez

  • May 09, 2023 02:39

  

  

  Hi! I just solved a similar problem! It was a dirty gas line. I changed the filters to solve the issue. 

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